PT2SI AND PTSI FORMATION WITH HIGH-PURITY PT THIN-FILMS

被引：118

作者：

CANALI, C

CATELLANI, C

PRUDENZIATI, M

WADLIN, WH

EVANS, CA

机构：

[1] UNIV MODENA,INST FIS,I-41100 MODENA,ITALY

[2] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801

来源：

APPLIED PHYSICS LETTERS | 1977年 / 31卷 / 01期

关键词：

D O I：

10.1063/1.89473

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：43 / 45

页数：3

共 9 条

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[7] SOLID-SOLID REACTIONS IN PT-SI SYSTEMS [J].

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[9] POROSITY IN SPUTTERED PLATINUM FILMS [J].

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