EFFECT OF OXYGEN ON FORMATION OF GERMANIUM FILMS

被引：14
作者：
ADAMSKY, RF
BEHRNDT, KH
BROGAN, WT
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1969年 / 6卷 / 04期
关键词：
D O I：
10.1116/1.1315676
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：542 / &
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