共 50 条
[25]
Selective Etching Technologies for GaAs/AlGaAs in Vertical-Cavity Surface-Emitting Lasers
[J].
Zhongguo Jiguang/Chinese Journal of Lasers,
2020, 47 (04)
[26]
ICP Etching Process of GaAs/AlGaAs for Vertical-Cavity Surface-Emitting Lasers
[J].
CHINESE JOURNAL OF LASERS-ZHONGGUO JIGUANG,
2020, 47 (04)