共 7 条
[3]
FATHIMULLA A, 1987, OCT COMP SEM GROWTH
[5]
Itoh T., 1986, International Electron Devices Meeting 1986. Technical Digest (Cat. No.86CH2381-2), P771
[6]
KAPOOR VK, 1980, P S DIELECTRIC FILMS, V863
[7]
OHNO H, 1980, I PHY C SER, V56, P465