MOLECULAR-DYNAMICS STUDIES OF THE GROWTH MODES AND STRUCTURE OF AMORPHOUS-SILICON FILMS VIA ATOM DEPOSITION

被引：58
作者：
LUEDTKE, WD
LANDMAN, U
机构：
来源：
PHYSICAL REVIEW B | 1989年 / 40卷 / 17期
关键词：
D O I：
10.1103/PhysRevB.40.11733
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：11733 / 11746
页数：14
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