Tb-Fe-Co/Ta multilayers were deposited on plasma-free glass slide substrates by using a facing targets sputtering apparatus. The specimen films with very thin thickness of Ta layers less than 1 nm revealed nat and sharp interfaces. The enhancement of Kerr rotation angle was increased with decreasing thickness of paramagnetic Ta layer. The magnetic interaction between Tb-Fe-Co layers were observed even in the multilayers with the thickness of Ta layers approaching 20 nm.