SILICON DIFFUSED-ELEMENT PIEZORESISTIVE DIAPHRAGMS

被引：165
作者：
TUFTE, ON
LONG, D
CHAPMAN, PW
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1962年 / 33卷 / 11期
关键词：
D O I：
10.1063/1.1931164
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：3322 / &
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