EXCIMER LASER ABLATION OF POLYIMIDE

被引：37

作者：

ULMER, G ^{[1
]}

HASSELBERGER, B ^{[1
]}

BUSMANN, HG ^{[1
]}

CAMPBELL, EEB ^{[1
]}

机构：

[1] UNIV FREIBURG,FMF,W-7800 FREIBURG,GERMANY

来源：

APPLIED SURFACE SCIENCE | 1990年 / 46卷 / 1-4期

关键词：

D O I：

10.1016/0169-4332(90)90155-S

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The velocity and angular distributions of the positively charged, negatively charged and neutral products from 308 nm laser ablation of polyimide have been investigated. The differences in the distributions for the three kinds of products can be attributed to the different formation mechanisms. Positive ions are formed in the centre of the laser focus and are ejected with a cos4θ distribution about the surface normal. Neutral and negatively charged products show a cos θ angular distribution. All products are ejected with supersonic velocities with vpositive>vnegative>vneutral for a given laser fluence. © 1990.

引用

收藏

页码：272 / 278

页数：7

相关论文

共 14 条

[1] DIRECT ETCHING OF POLYMERIC MATERIALS USING A XECL LASER [J].

ANDREW, JE ;

DYER, PE ;

FORSTER, D ;

KEY, PH .

APPLIED PHYSICS LETTERS, 1983, 43 (08) :717-719

[2] EXCIMER LASER ETCHING OF POLYIMIDE [J].

BRANNON, JH ;

LANKARD, JR ;

BAISE, AI ;

BURNS, F ;

KAUFMAN, J .

JOURNAL OF APPLIED PHYSICS, 1985, 58 (05) :2036-2043

[3] ANALYSIS OF IONIC FRAGMENTS FROM 308 NM PHOTOABLATION OF POLYIMIDE [J].

CAMPBELL, EEB ;

ULMER, G ;

BUES, K ;

HERTEL, IV .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1989, 48 (06) :543-547

[4] INVESTIGATION OF POSITIVE AND NEGATIVE IONIC PRODUCTS FROM LASER ABLATION OF POLYMERS [J].

CAMPBELL, EEB ;

ULMER, G ;

HASSELBERGER, B ;

HERTEL, IV .

APPLIED SURFACE SCIENCE, 1989, 43 :346-351

[5]

CAMPBELL EEB, UNPUB J CHEM PHYS

[6] LARGE CARBON CLUSTER ION FORMATION BY LASER ABLATION OF POLYIMIDE AND GRAPHITE [J].

CREASY, WR ;

BRENNA, JT .

CHEMICAL PHYSICS, 1988, 126 (2-3) :453-468

[7] NANOSECOND PHOTOACOUSTIC STUDIES ON ULTRAVIOLET-LASER ABLATION OF ORGANIC POLYMERS [J].

DYER, PE ;

SRINIVASAN, R .

APPLIED PHYSICS LETTERS, 1986, 48 (06) :445-447

[8] ON THE DUAL ROLE OF THE KNUDSEN LAYER AND UNSTEADY, ADIABATIC EXPANSION IN PULSE SPUTTERING PHENOMENA [J].

KELLY, R .

JOURNAL OF CHEMICAL PHYSICS, 1990, 92 (08) :5047-5056

[9] EMISSION-SPECTRA, SURFACE QUALITY, AND MECHANISM OF EXCIMER LASER ETCHING OF POLYIMIDE FILMS [J].

KOREN, G ;

YEH, JTC .

APPLIED PHYSICS LETTERS, 1984, 44 (12) :1112-1114

[10] DETECTION OF NEUTRAL PRODUCTS FORMED DURING EXCIMER LASER ABLATION OF POLYIMIDE BY UV AND VUV LASER PHOTOIONIZATION MASS-SPECTROMETRY [J].

OTIS, CE .

APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1989, 49 (05) :455-461