MICROMACHINING OF MONOCRYSTALLINE SILICON AND GLASS FOR CHEMICAL-ANALYSIS SYSTEMS - A LOOK INTO NEXT CENTURY TECHNOLOGY OR JUST A FASHIONABLE CRAZE

被引：216

作者：

MANZ, A ^{[1
]}

FETTINGER, JC ^{[1
]}

VERPOORTE, E ^{[1
]}

LUDI, H ^{[1
]}

WIDMER, HM ^{[1
]}

HARRISON, DJ ^{[1
]}

机构：

[1] UNIV ALBERTA,DEPT CHEM,EDMONTON T6G 2G2,ALBERTA,CANADA

来源：

TRAC-TRENDS IN ANALYTICAL CHEMISTRY | 1991年 / 10卷 / 05期

关键词：

D O I：

10.1016/0165-9936(91)85116-9

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Miniaturization of already existing techniques in on-line analytical chemistry is an alternative to compound-selective chemical sensors. Theory indicates higher efficiency, faster analysis time and lower reagent consumption. Micromachining, a well known photolithographic technique for structures in the micrometer range, is introduced and documented with structures as examples for flow injection analysis, electrophoresis and a detector cell.

引用

页码：144 / 149

页数：6

共 24 条

[1] CHEMICAL SENSING IN THE ENVIRONMENT - THE CHALLENGE TO THE ANALYTICAL CHEMIST [J].