COMPARISON OF SPUTTER-ION PUMP AND REDHEAD GAUGE AS APPENDAGE PUMPS

被引：0

作者：

BURROUGHS, EG

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1969年 / 40卷 / 01期

关键词：

D O I：

10.1063/1.1683730

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

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页码：182 / +

页数：1

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