LASER-INDUCED ANISOTROPIC THERMOELECTRIC VOLTAGES IN THIN-FILMS

被引:43
作者
GUTFELD, RJV [1 ]
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HEIGHTS,NY 10598
关键词
D O I
10.1063/1.1654860
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:206 / 208
页数:3
相关论文
共 11 条
[1]   MECHANISMS OF STRESS RELIEF IN POLYCRYSTALLINE FILMS [J].
CHAUDHARI, P .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1969, 13 (02) :197-+
[2]  
CHOPRA KL, 1969, THIN FILM PHENOMENA, pCH5
[3]  
CUOMO JJ, PRIVATE COMMUNICATIO
[4]  
Feinleib J., 1972, J NONCRYSTALLINE SOL, V8, P909, DOI [10.1016/0022-3093(72)90246-3, DOI 10.1016/0022-3093(72)90246-3]
[5]  
GUTFELD RJV, 1972, J APPL PHYS, V43, P4688
[6]  
GUTFELD RJV, 1970, OPTOELECTRONICS, V2, P215
[7]   INTRINSIC STRESS IN EVAPORATED METAL FILMS [J].
KLOKHOLM, E ;
BERRY, BS .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1968, 115 (08) :823-&
[8]  
LANKARD JR, 1969, IEEE J QUANTUM ELECT, VQE 5, P625
[9]   MICROMACHINING AND IMAGE RECORDING ON THIN FILMS BY LASER BEAMS [J].
MAYDAN, D .
BELL SYSTEM TECHNICAL JOURNAL, 1971, 50 (06) :1761-+
[10]  
MEYER JA, 1970, APPL PHYS LETTERS, V16, P3