ELECTRICAL CHARACTERISTICS OF ION-IMPLANTED P-CHANNEL MOS-TRANSISTORS

被引:11
作者
NAKAMURA, K [1 ]
KAMOSHIDA, M [1 ]
机构
[1] NIPPON ELECT CO LTD, IC DIV, 1753 SHIMONUMABE, KAWASAKI 211, JAPAN
关键词
D O I
10.1063/1.1662981
中图分类号
O59 [应用物理学];
学科分类号
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页码:334 / 340
页数:7
相关论文
共 16 条
[1]   INFLUENCE OF NON-UNIFORMLY DOPED SUBSTRATES ON MOS C-V CURVES [J].
BROTHERTON, SD ;
BURTON, P .
SOLID-STATE ELECTRONICS, 1970, 13 (12) :1591-+
[2]   COMPLEMENTARY MOS 1.2 VOLT WATCH CIRCUIT USING ION IMPLANTATION [J].
COPPEN, PJ ;
BAUER, LO ;
AUBUCHON, KG ;
MOYER, NE .
SOLID-STATE ELECTRONICS, 1972, 15 (02) :165-&
[3]  
DILL HG, 1971, 2 P INT C ION IMPL S, P315
[4]   RANGE DISTRIBUTION THEORY BASED ON ENERGY-DISTRIBUTION OF IMPLANTED IONS [J].
FURUKAWA, S ;
ISHIWARA, H .
JOURNAL OF APPLIED PHYSICS, 1972, 43 (03) :1268-&
[5]   BREAKDOWN VOLTAGES OF GERMANIUM PLANE-CYLINDRICAL JUNCTIONS [J].
GIBBONS, G ;
KOCSIS, J .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1965, ED12 (04) :193-&
[6]   EFFECT OF SURFACE FIELDS ON BREAKDOWN VOLTAGE OF PLANAR SILICON P-N JUNCTIONS [J].
GROVE, AS ;
LEISTIKO, O ;
HOOPER, WW .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1967, ED14 (03) :157-+
[7]   AVALANCHE DRIFT INSTABILITY IN PLANAR PASSIVATED P-N JUNCTIONS [J].
GURTLER, RW .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1968, ED15 (12) :980-+
[8]   A NEW INSTABILITY IN MOS TRANSISTOR CAUSED BY HOT ELECTRON AND HOLE INJECTION FROM DRAIN AVALANCHE PLASMA INTO GATE OXIDE [J].
HARA, H ;
OKAMOTO, Y ;
OHNUMA, H .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1970, 9 (09) :1103-+
[9]   CHARACTERISTICS OF P-CHANNEL MOS FIELD-EFFECT TRANSISTORS WITH ION-IMPLANTED CHANNELS [J].
HSWE, M ;
SHOPBELL, ML ;
MAI, CC ;
PALMER, RB .
SOLID-STATE ELECTRONICS, 1972, 15 (11) :1237-+
[10]  
JOHNSON WS, 1970, PROJECTED RANGE STAT