THE ROLE OF EXCITED SPECIES IN UV-LASER MATERIALS ABLATION .1. PHOTOPHYSICAL ABLATION OF ORGANIC POLYMERS

被引：54

作者：

LUKYANCHUK, B

BITYURIN, N

ANISIMOV, S

BAUERLE, D

机构：

[1] Angewandte Physik, Johannes-Kepler-Universität Linz, Linz

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1993年 / 57卷 / 04期

关键词：

D O I：

10.1007/BF00332291

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

UV-laser ablation is described in terms of a two-level system in which the excitation energy is dissipated via stimulated emission, thermal relaxation, and activated desorption of excited species. For thermal relaxation times t(T) > 10)(-9) s and DELTAE* << DELTAE (activation energies for excited-state and ground-state species) the model predicts high ablation rates at moderate surface temperatures, typically below 2000-degrees-C.

引用

页码：367 / 374

页数：8

共 17 条

[1]

ANISIMOV SI, 1987, SOV SCI REV A, V8, P259

[2] EMISSION MECHANISM IN POLYIMIDE [J].