PLANAR SILICON FIELD-EFFECT TRANSISTORS WITH LANGMUIR-BLODGETT GATE INSULATORS

被引:19
作者
FUNG, CD [1 ]
LARKINS, GL [1 ]
机构
[1] CASE WESTERN RESERVE UNIV,CASE INST TECHN,DEPT MACROMOLEC SCI,CLEVELAND,OH 44106
关键词
D O I
10.1016/0040-6090(85)90454-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:33 / 39
页数:7
相关论文
共 8 条
[2]  
DAY DR, 1980, THESIS CASE W RESERV, P134
[3]   THE STUDY OF METAL-INSULATOR SEMICONDUCTOR STRUCTURES WITH LANGMUIR-BLODGETT INSULATORS [J].
DEWA, AS ;
FUNG, CD ;
DIPOTO, EP ;
RICKERT, SE .
THIN SOLID FILMS, 1985, 132 (1-4) :27-32
[4]  
KAN KK, 1980, PHYSICS MOS INSULATO, P344
[5]   IN P-LANGMUIR-FILM MISFET [J].
ROBERTS, GG ;
PANDE, KP ;
BARLOW, WA .
IEE JOURNAL ON SOLID-STATE AND ELECTRON DEVICES, 1978, 2 (06) :169-175
[6]   TRANSDUCER AND OTHER APPLICATIONS OF LANGMUIR-BLODGETT FILMS [J].
ROBERTS, GG .
SENSORS AND ACTUATORS, 1983, 4 (02) :131-145
[7]   ELECTRON-MOBILITY IN INVERSION AND ACCUMULATION LAYERS ON THERMALLY OXIDIZED SILICON SURFACES [J].
SUN, SC ;
PLUMMER, JD .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1980, 27 (08) :1497-1508
[8]  
Sze SM, 1981, PHYSICS SEMICONDUCTO, P440