CHEMICAL VAPOR-DEPOSITION OF MOLYBDENUM ON GRAPHITE

被引：13
作者：
MIYAKE, M
HIROOKA, Y
IMOTO, T
SANO, T
机构：
来源：
THIN SOLID FILMS | 1981年 / 79卷 / 01期
关键词：
D O I：
10.1016/0040-6090(81)90430-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：75 / 81
页数：7
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