THE PREPARATION OF THIN-FILMS BY PHYSICAL VAPOR-DEPOSITION METHODS

被引：217
作者：
REICHELT, K
JIANG, X
机构：
来源：
THIN SOLID FILMS | 1990年 / 191卷 / 01期
关键词：
D O I：
10.1016/0040-6090(90)90277-K
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The preparation of thin films by physical vapour deposition methods is described. At first the different processes for the ejection of particles into vacuum and the characteristic properties of the particles (ionization degree, kinetic energy etc.) are discussed. The influence of the growth parameters on the initial growth and the growth after coalescence is reported. The interrelations are illustrated by experimental findings and computer simulations. © 1990.
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页码：91 / 126
页数：36
相关论文
共 53 条
[1]   ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON [J].
AISENBERG, S ;
CHABOT, R .
JOURNAL OF APPLIED PHYSICS, 1971, 42 (07) :2953-+
[2]  
ALEKSANDROV LN, 1979, PHYS STATUS SOLIDI A, V54, P463, DOI 10.1002/pssa.2210540204
[3]  
Angus J.C., 1986, PLASMA DEPOSITED THI, P89
[4]   SI MOLECULAR-BEAM EPITAXY - A MODEL FOR TEMPERATURE-DEPENDENT INCORPORATION PROBABILITIES AND DEPTH DISTRIBUTIONS OF DOPANTS EXHIBITING STRONG SURFACE SEGREGATION [J].
BARNETT, SA ;
GREENE, JE .
SURFACE SCIENCE, 1985, 151 (01) :67-90
[5]  
BERISCH H, SPUTTERING PARTICLE
[6]   CATHODE-SPOT ARC COATINGS - PHYSICS, DEPOSITION AND HEATING RATES, AND SOME EXAMPLES [J].
BOXMAN, RL ;
GOLDSMITH, S .
SURFACE & COATINGS TECHNOLOGY, 1987, 33 (1-4) :153-167
[7]   RF-PLASMA DEPOSITED AMORPHOUS HYDROGENATED HARD CARBON THIN-FILMS - PREPARATION, PROPERTIES, AND APPLICATIONS [J].
BUBENZER, A ;
DISCHLER, B ;
BRANDT, G ;
KOIDL, P .
JOURNAL OF APPLIED PHYSICS, 1983, 54 (08) :4590-4595
[8]   ACTIVATED REACTIVE EVAPORATION PROCESS FOR HIGH RATE DEPOSITION OF COMPOUNDS [J].
BUNSHAH, RF ;
RAGHURAM, AC .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (06) :1385-&
[9]   ION-IMPLANTATION INTO METALS AND CARBIDES [J].
DEARNALEY, G ;
HARTLEY, NEW .
THIN SOLID FILMS, 1978, 54 (02) :215-232
[10]  
DIMIGEN H, 1979, THIN SOLID FILMS, V64, P221, DOI 10.1016/0040-6090(79)90513-3
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