HIGH-VACUUM NEEDLE VALVE

被引：0

作者：

ABELMASOV, EE

KOZLOV, VA

机构：

来源：

INSTRUMENTS AND EXPERIMENTAL TECHNIQUES | 1991年 / 34卷 / 01期

关键词：

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The authors describe an unheated high-vacuum flow regulator for use in a vacuum apparatus with a low evacuation rate. The needle valve has a working-pressure range of 5 . 10(-3)-10(-7) torr. A distinguishing feature of the valve is a seat of soft metal (In or Pb-Sn) formed in situ by the needle.

引用

页码：214 / 215

页数：2