MULTIPLE BEAM-SHAPING DIAPHRAGM FOR EFFICIENT EXPOSURE OF GRATINGS

被引：7

作者：

ELSNER, H

HAHMANN, P

DAHM, G

KOOPS, HWP

机构：

[1] TH DARMSTADT,INST HALBLEITERTECH,D-64295 DARMSTADT,GERMANY

[2] FORSCHUNGSINST DEUTSCH BUNDESPOST TELEKOM,D-64295 DARMSTADT,GERMANY

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1993年 / 11卷 / 06期

关键词：

D O I：

10.1116/1.586989

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The variable-shaped beam principle has some advantages over Gaussian beams in terms of throughput. The multiple beam-shaping diaphragm concept offers additional capabilities and further increase of throughput. The fabrication procedure of the diaphragm blades are described. We used the multiple beam-shaping diaphragm in ZBA 31/32 from JENOPTIK for efficient exposure of gratings with critical dimension down to 150 nm.

引用

页码：2373 / 2377

页数：5