ENHANCED CONDUCTIVITY IN PLASMA-HYDROGENATED POLYSILICON FILMS

被引：44

作者：

CAMPBELL, DR

机构：

来源：

APPLIED PHYSICS LETTERS | 1980年 / 36卷 / 07期

关键词：

D O I：

10.1063/1.91563

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：604 / 606

页数：3

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