CHEMICAL VAPOR-DEPOSITION OF ZNO EPITAXIAL-FILMS ON SAPPHIRE

被引：20

作者：

TIKU, SK ^{[1
]}

LAU, CK ^{[1
]}

LAKIN, KM ^{[1
]}

机构：

[1] UNIV SO CALIF,DEPT MAT SCI,LOS ANGELES,CA 90007

来源：

APPLIED PHYSICS LETTERS | 1980年 / 36卷 / 04期

关键词：

D O I：

10.1063/1.91477

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：318 / 320

页数：3

共 10 条

[1]

DUFFY MT, 1978, HETEROEPITAXIAL SEMI

[2] EPITAXIAL ZNO ON SAPPHIRE [J].

GALLI, G ;

COKER, JE .

APPLIED PHYSICS LETTERS, 1970, 16 (11) :439-&

[3]

LAKIN KM, 1971, IEEE ULTRASONICS S M

[4] CHEMICAL VAPOR-DEPOSITION OF SINGLE-CRYSTALLINE ZNO FILM WITH SMOOTH SURFACE ON INTERMEDIATELY SPUTTERED ZNO THIN-FILM ON SAPPHIRE [J].

OHNISHI, S ;

HIROKAWA, Y ;

SHIOSAKI, T ;

KAWABATA, A .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1978, 17 (05) :773-778

[5] RF SPUTTERED EPITAXIAL ZNO FILMS ON SAPPHIRE FOR INTEGRATED-OPTICS [J].

PARADIS, EL ;

SHUSKUS, AJ .

THIN SOLID FILMS, 1976, 38 (02) :131-141

[6] INVESTIGATION OF SURFACE ACOUSTIC-WAVE PROPERTIES OF HETEROEPITAXIAL ZNO LAYERS ON AL2O3 [J].

PIZZARELLO, F .

JOURNAL OF APPLIED PHYSICS, 1972, 43 (09) :3627-+

[7]

Reisman A., 1973, Journal of Electronic Materials, V2, P177, DOI 10.1007/BF02666151

[8]

Reisman A., 1972, J ELECTRON MATER, V1, P395, DOI [10.1007/BF02659165, DOI 10.1007/BF02659165]

[9]

Shiosaki T., 1978, IEEE ULTRASONICS S P, P100

[10]

SMITH HI, 1977, SURFACE WAVE FILTERS

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