THRESHOLD ENERGIES IN MECHANICAL COLLISION THEORIES OF CATHODE SPUTTERING

被引：12
作者：
HENSCHKE, EB
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1962年 / 33卷 / 05期
关键词：
D O I：
10.1063/1.1728829
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：1773 / &
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共 27 条
[1]   SPUTTERING OF ALKALI ATOMS BY INERT GAS IONS OF LOW ENERGY [J].
BRADLEY, RC .
PHYSICAL REVIEW, 1954, 93 (04) :719-728
[2]   Penetration of low speed diffracted electrons [J].
Farnsworth, HE .
PHYSICAL REVIEW, 1936, 49 (08) :0605-0609
[3]   About the Sputtering at oblique Collision of the Ions [J].
Fetz, H. .
ZEITSCHRIFT FUR PHYSIK, 1942, 119 (9-10) :590-601
[4]  
GUENTHERSCHULZE A, 1953, VACUUM, V3, P369
[5]  
GUTHRIE A, 1949, CHARACTERISTICS ELEC, pCH9
[6]   COMPARISON OF STRUCTURES OF SURFACES PREPARED IN HIGH VACUUM BY CLEAVING AND BY ION BOMBARDMENT AND ANNEALING [J].
HANEMAN, D .
PHYSICAL REVIEW, 1960, 119 (02) :563-566
[7]   COLLISION THEORIES OF CATHODE SPUTTERING OF METALS AT LOW ION ENERGIES [J].
HENSCHKE, EB .
PHYSICAL REVIEW, 1961, 121 (05) :1286-&
[8]   NEW COLLISION THEORY OF CATHODE SPUTTERING OF METALS AT LOW ION ENERGIES [J].
HENSCHKE, EB .
PHYSICAL REVIEW, 1957, 106 (04) :737-753
[9]   DEPOSIT SPOT PATTERNS FROM LOW-INDEX PLANES OF METAL SINGLE CRYSTALS IN A NEW THEORY OF CATHODE SPUTTERING [J].
HENSCHKE, EB .
JOURNAL OF APPLIED PHYSICS, 1957, 28 (04) :411-420
[10]  
HENSCHKE EB, TO BE PUBLISHED
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