DEPENDENCE OF ELECTROMIGRATION-INDUCED FAILURE TIME ON LENGTH AND WIDTH OF ALUMINUM THIN-FILM CONDUCTORS

被引：78

作者：

AGARWALA, BN

ATTARDO, MJ

INGRAHAM, AP

机构：

来源：

关键词：

D O I：

10.1063/1.1658395

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3954 / &

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