SPIN COATING - ONE-DIMENSIONAL MODEL

被引:221
作者
BORNSIDE, DE [1 ]
MACOSKO, CW [1 ]
SCRIVEN, LE [1 ]
机构
[1] UNIV MINNESOTA, DEPT CHEM ENGN & MAT SCI, MINNEAPOLIS, MN 55455 USA
关键词
D O I
10.1063/1.343754
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:5185 / 5193
页数:9
相关论文
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