X-RAY DOUBLE-CRYSTAL ROCKING CURVES IN GAALAS/GAAS HETEROSTRUCTURES

X-ray double-crystal rocking curves of Ga1-xAlxAs/GaAs heterostructures have been calculated using a dynamical diffraction model for the general case of Bragg reflection geometry. Different experimental configurations have been considered and the possibility of studying both slightly mismatched and relatively thin layers has been investigated. Experimental rocking curves have been measured using the Cu K-alpha-1 radiation, the 004 symmetric reflection and a perfect crystal as the monochromator. An excellent agreement between calculated and experimental rocking curves has been found and this demonstrates the reliability of both the experimental procedure and the theoretical approach.