HYDROGEN PERMEATION APPARATUS WITH THERMAL-DESORPTION SPECTROSCOPY CAPABILITIES

被引：23
|
作者：
CHECCHETTO, R
GRATTON, LM
MIOTELLO, A
CESTARI, C
机构：
[1] UNIV TRENT, DIPARTIMENTO FIS, I-38050 TRENT, ITALY
[2] CTR MAT & BIOFIS MED, I-38050 TRENT, ITALY
来源：
MEASUREMENT SCIENCE AND TECHNOLOGY | 1995年 / 6卷 / 11期
关键词：
D O I：
10.1088/0957-0233/6/11/008
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We describe an ultra-high-vacuum experimental apparatus, based on a gas phase technique, mainly dedicated to hydrogen permeation studies of thin films deposited on metallic substrates. The apparatus is also provided with a sample holder and a heating system for thermal desorption spectroscopy. Calibration and measurement procedures are described. To prove the efficiency of the new apparatus some experiments concerning hydrogen permeation through amorphous SiC film deposited on steel and thermal desorption of Kr ions implanted into Ti films are illustrated.
引用
收藏
页码：1605 / 1611
页数：7
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