CORRELATION BETWEEN SILICON HYDRIDE SPECIES AND THE PHOTOLUMINESCENCE INTENSITY OF POROUS SILICON

被引：236

作者：

TSAI, C ^{[1
]}

LI, KH ^{[1
]}

KINOSKY, DS ^{[1
]}

QIAN, RZ ^{[1
]}

HSU, TC ^{[1
]}

IRBY, JT ^{[1
]}

BANERJEE, SK ^{[1
]}

TASCH, AF ^{[1
]}

CAMPBELL, JC ^{[1
]}

HANCE, BK ^{[1
]}

WHITE, JM ^{[1
]}

机构：

[1] UNIV TEXAS,DEPT CHEM & BIOCHEM,AUSTIN,TX 78712

来源：

APPLIED PHYSICS LETTERS | 1992年 / 60卷 / 14期

关键词：

D O I：

10.1063/1.107190

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The role of silicon hydride species in the photoluminescence intensity behavior of porous Si has been studied. The surfaces of luminescent porous Si samples were converted to a predominate SiH termination using a remote H plasma. The as-passivated samples were then immersed in various concentrations of hydrofluoric solutions to regulate the recovery of SiH2 termination on the surface. Photoluminescence measurements and transmission Fourier-transform infrared spectroscopy have shown that predominant silicon monohydride (SiH) termination results in weak photoluminescence. In contrast, it has been observed that the appearance of silicon dihydride (SiH2) coincides with an increase in the photoluminescence intensity.

引用

页码：1700 / 1702

页数：3

共 18 条

[1] VERY LOW DEFECT REMOTE HYDROGEN PLASMA CLEAN OF SI(100) FOR HOMOEPITAXY [J].