SURFACE CLEANING IN THIN-FILM TECHNOLOGY

被引：48
作者：
MATTOX, DM
机构：
来源：
THIN SOLID FILMS | 1978年 / 53卷 / 01期
关键词：
D O I：
10.1016/0040-6090(78)90376-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：81 / 96
页数：16
相关论文
共 90 条
[1]   IODINE TREATMENT OF NYLON - EFFECT ON METAL PLATING OF POLYMER [J].
ABUISA, IA .
JOURNAL OF APPLIED POLYMER SCIENCE, 1971, 15 (11) :2865-&
[2]   ETCHING OF HIGH ALUMINA CERAMICS TO PROMOTE COPPER ADHESION [J].
AMEEN, JG ;
MCBRIDE, DG ;
PHILLIPS, GC .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (11) :1518-1522
[3]  
AMICK JA, 1976, SOLID STATE TECHNOL, V19, P47
[4]   INVESTIGATION OF LOW-ENERGY ION SCATTERING AS A SURFACE ANALYTICAL TECHNIQUE [J].
BALL, DJ ;
BUCK, TM ;
WHEATLEY, GH ;
MACNAIR, D .
SURFACE SCIENCE, 1972, 30 (01) :69-&
[5]   CLEANING AND SURFACE PREPARATION [J].
BEAL, SE .
THIN SOLID FILMS, 1978, 53 (01) :97-98
[6]   ATOMICALLY CLEAN SURFACES BY PULSED LASER BOMBARDMENT [J].
BEDAIR, SM ;
SMITH, HP .
JOURNAL OF APPLIED PHYSICS, 1969, 40 (12) :4776-&
[7]  
BERMAN SM, 1975, EFFICIENT USE ENER 3, P292
[8]   PLASMA ETCHING OF THIN METAL AND DIELECTRIC FILMS [J].
BERSIN, RL .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01) :169-169
[9]  
BICKERMAN JJ, 1965, PHYS STATUS SOLIDI, V10, P3
[10]  
CALDER R, 1977, 7TH P INT VAC C 3RD, P231
123456789