CALCULATION OF THE CURRENT-VOLTAGE-PRESSURE CHARACTERISTICS OF DC DIODE SPUTTERING DISCHARGES

被引：26

作者：

MANIV, S

WESTWOOD, WD

SCANLON, PJ

机构：

[1] BELL NO RES,OTTAWA K1Y 4H7,ONTARIO,CANADA

[2] QUEENS UNIV,DEPT PHYS,KINGSTON K7L 3N6,ONTARIO,CANADA

来源：

JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 02期

关键词：

D O I：

10.1063/1.330550

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：856 / 860

页数：5

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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (03) :743-751

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