A MICROWAVE-DISCHARGE ATOM BEAM SOURCE OF HIGH-INTENSITY

被引:19
作者
DONNELLY, A
HUGHES, MP
GEDDES, J
GILBODY, HB
机构
[1] Dept. of Pure and Appl. Phys., Queen's Univ., Belfast
关键词
D O I
10.1088/0957-0233/3/5/014
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A 2.45 GHz microwave discharge atom beam source of compact design has been developed. A standard extended quarter wavelength cavity design has been used in conjunction with a simple discharge tube and cooling arrangement. The source, while primarily designed for the production of atomic hydrogen, has also been tested with oxygen and nitrogen. The characteristics of the microwave source are compared with those of a Slevin type RF source and the influence of different cleaning procedures on performance have been investigated. Unlike the Slevin source the performance of the microwave source is not critically dependent on the cleaning procedure or gas purity. For hydrogen, both sources could provide a dissociation fraction of about 90% but the beam intensity obtainable from the microwave source (> 10(14) atoms cm-3) at the exit of a 1 mm capillary tube was significantly greater than that from the Slevin source. For oxygen, where the performance of the Slevin source was poor, the microwave source provided a dissociation fraction of up to about 60% and a beam density of about 10(13) atoms cm-3.
引用
收藏
页码:528 / 532
页数:5
相关论文
共 12 条
[1]   PRODUCTION OF H-ATOM AND O-ATOM BEAMS BY A COOLED MICROWAVE-DISCHARGE SOURCE [J].
DING, A ;
KARLAU, J ;
WEISE, J .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1977, 48 (08) :1002-1004
[2]   MICROWAVE DISCHARGE CAVITIES OPERATING AT 2450 MHZ [J].
FEHSENFELD, FC ;
EVENSON, KM ;
BROIDA, HP .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1965, 36 (03) :294-+
[3]   GAS-DISCHARGE ATOMIC-HYDROGEN SOURCE FOR ELECTRON-SCATTERING EXPERIMENTS [J].
HOOD, ST ;
DIXON, AJ ;
WEIGOLD, E .
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1978, 11 (09) :948-954
[4]   STRUCTURE OF THE BORON-HYDROGEN COMPLEX IN CRYSTALLINE SILICON [J].
MARWICK, AD ;
OEHRLEIN, GS ;
JOHNSON, NM .
PHYSICAL REVIEW B, 1987, 36 (08) :4539-4542
[5]   ATOMIC-HYDROGEN BEAM SOURCE - CONVENIENT, EXTENDED CAVITY, MICROWAVE-DISCHARGE DESIGN [J].
MURPHY, EJ ;
BROPHY, JH .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1979, 50 (05) :635-636
[6]  
RAMO S, 1965, FIELDS WAVES COMMUNI, P558
[7]   PULSED CROSSED-BEAM STUDY OF THE IONIZATION OF ATOMIC-HYDROGEN BY ELECTRON-IMPACT [J].
SHAH, MB ;
ELLIOTT, DS ;
GILBODY, HB .
JOURNAL OF PHYSICS B-ATOMIC MOLECULAR AND OPTICAL PHYSICS, 1987, 20 (14) :3501-3514
[8]   RADIO-FREQUENCY ATOMIC-HYDROGEN BEAM SOURCE [J].
SLEVIN, J ;
STIRLING, W .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1981, 52 (11) :1780-1782
[9]   The surface recombination of H atoms and OH radicals [J].
Smith, WV .
JOURNAL OF CHEMICAL PHYSICS, 1943, 11 (03) :110-125
[10]   COMPARISON OF WALL SHIFT OF TFE AND FEP TEFLON COATINGS IN HYDROGEN MASER [J].
VANIER, J ;
LAROUCHE, R .
METROLOGIA, 1978, 14 (01) :31-37