IMPLANTS OF 15-50-MEV BORON IONS INTO SILICON

被引：17
|
作者：
LAFERLA, A
DIFRANCO, A
RIMINI, E
CIAVOLA, G
FERLA, G
机构：
[1] LAB NAZL SUD,CATANIA,ITALY
[2] SGS THOMSON MICROELECTRON,I-95100 CATANIA,ITALY
来源：
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1989年 / 2卷 / 1-3期
关键词：
D O I：
10.1016/0921-5107(89)90078-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：69 / 73
页数：5
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