2 METHODS TO IMPROVE THE PERFORMANCE OF MONTE-CARLO SIMULATIONS OF ION-IMPLANTATION IN AMORPHOUS TARGETS

被引：2
作者：
VANSCHIE, E
MIDDELHOEK, J
机构：
来源：
IEEE TRANSACTIONS ON COMPUTER-AIDED DESIGN OF INTEGRATED CIRCUITS AND SYSTEMS | 1989年 / 8卷 / 02期
关键词：
D O I：
10.1109/43.21829
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
引用
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页码：108 / 113
页数：6
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