ELECTROFORMING AND DIELECTRIC BREAKDOWN IN THIN ALUMINUM-OXIDE FILMS

被引：18

作者：

MORGAN, DV ^{[1
]}

HOWES, MJ ^{[1
]}

POLLARD, RD ^{[1
]}

WATERS, DGP ^{[1
]}

机构：

[1] UNIV LEEDS,DEPT ELECT & ELECTR ENG,LEEDS,YORKSHIRE,ENGLAND

来源：

THIN SOLID FILMS | 1973年 / 15卷 / 01期

关键词：

D O I：

10.1016/0040-6090(73)90210-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：123 / 131

页数：9

共 50 条

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[28] PLASMA DEPOSITION OF ALUMINUM-OXIDE FILMS [J].

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JOURNAL OF ELECTRONIC MATERIALS, 1988, 17 (02) :127-134

[29] COMPOSITION OF ANODIC ALUMINUM-OXIDE FILMS [J].

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[30] SPECIAL FEATURES OF ELECTROLUMINESCENCE DURING THE FORMATION OF DIELECTRIC FILMS ON ANODIC ALUMINUM-OXIDE [J].

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