GROWTH OF VERY THIN OXIDE-FILMS ON SILICON FOR USE IN MNOS CHARGE STORAGE DEVICES

被引：17
作者：
OAKLEY, RE
GODBER, GA
机构：
来源：
THIN SOLID FILMS | 1972年 / 9卷 / 02期
关键词：
D O I：
10.1016/0040-6090(72)90258-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：287 / &
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