BA2SI2TIO8 FOR SURFACE-ACOUSTIC-WAVE DEVICES

被引:18
作者
YAMAUCHI, H [1 ]
YAMASHITA, K [1 ]
TAKEUCHI, H [1 ]
机构
[1] HITACHI LTD, CENT RES LAB, KOKUBUNJI, TOKYO 185, JAPAN
关键词
D O I
10.1063/1.326398
中图分类号
O59 [应用物理学];
学科分类号
摘要
Characteristics of piezoelectric fresnoite (Ba2Si 2TiO8) for surface-acoustic-wave (SAW) devices are calculated. In general, the SAW characteristics of this material are located between those of LiNbO3 and LiTaO3. It always has nonzero temperature coefficients of delay (TCD's). The lowest TCD is approximately 38×10-6/K, corresponding to the Bleustein-Gulyaev wave on the Z-axis cylinder cuts. A layered structure of Ba2Si 2TiO8 thin film deposited on a fused-quartz substrate is expected to have excellent SAW characteristics, e.g., k2a (electromechanical coupling factor when the interdigital transducers are formed on the surface of the layer) =0.0158-0.0165, and TCD=0-25×10-6/K for kh (where k is the wave number and h is the layer thickness) =2.0-3.2. A comment is made in the Appendix on an additional contribution to the formula for the power flow, and this contribution is taken into account in the present calculation.
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页码:3160 / 3167
页数:8
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