SEMICONDUCTING SILICIDES AS POTENTIAL MATERIALS FOR ELECTROOPTIC VERY LARGE-SCALE INTEGRATED-CIRCUIT INTERCONNECTS

被引：87

作者：

BOST, MC ^{[1
]}

MAHAN, JE ^{[1
]}

机构：

[1] COLORADO RES DEV CORP, FT COLLINS, CO 80523 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1986年 / 4卷 / 06期

关键词：

D O I：

10.1116/1.583454

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：1336 / 1338

页数：3

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