MLEK CRYSTAL-GROWTH OF (100)INDIUM PHOSPHIDE

被引:18
作者
BLISS, DF
HILTON, RM
BACHOWSKI, S
ADAMSKI, JA
机构
[1] ROME LAB,BEDFORD,MA 01731
[2] PARKE MATH LABS,CARLISLE,MA 01741
关键词
INP; MLEK MLEC CRYSTAL GROWTH METHOD; KYROPOULOS;
D O I
10.1007/BF03030190
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have used a combined magnetic liquid encapsulated Kyropoulos/Czochralski (MLEK/MLEC) technique to produce twin-free indium phosphide (InP) crystals. This technique has advantages over the standard LEC method used for commercial production of InP. By stabilizing convective flows with a magnetic field and controlling the angle between solid and liquid, one can grow large diameter twin-free (100) InP crystals; they are shaped with a flat top as is typical for Kyropoulos growth, and then pulled from the magnetically stabilized melt as in Czochralski growth. This shaping method has the benefit of maximizing the number of single crystal wafers which can be sliced from the boule. MLEK InP growth is distinguished from other methods such as LEC and MLEC with respect to solid-liquid interface shape, dislocation density, and impurity distribution. This process has demonstrated that twin-free InP (100) crystals can be consistently grown.
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页码:967 / 971
页数:5
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