PROPERTIES OF MODIFIED ANODIC-SPARK-DEPOSITED ALUMINA POROUS CERAMIC FILMS AS HUMIDITY SENSORS

被引：15

作者：

CHEN, Z

JIN, MC

ZHEN, C

CHEN, GH

机构：

[1] Center for Materials Analysis, Department of Materials Science and Engineering, University of Electronic Science and Technology of China, Chengdu

来源：

JOURNAL OF THE AMERICAN CERAMIC SOCIETY | 1991年 / 74卷 / 06期

关键词：

HUMIDITY; ALUMINA; FILMS; ANODES; ELECTRICAL PROPERTIES;

D O I：

10.1111/j.1151-2916.1991.tb04106.x

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

alpha-Alumina films formed by anodic spark deposition in the melt of NaHSO4-KHSO4 mixture (200-degrees-C) exhibited a porous structure. It has been found that the porosity and amount of alpha phase varied with anodic current density. By electrical measurements, films were found to exhibit a continuous open-pore structure, causing failure of humidity sensors. This problem can be overcome by reanodization of the anodic-spark-deposited alumina films in either borax aqueous solution or sulfuric acid solution for a short time to form an effective barrier layer at the pore base. The modified anodic-spark-deposited alumina films showed highly sensitive response to water vapor change in the range of -76-degrees to +20-degrees-C dew point with much improved long-term stability. The humidity characteristics of the alpha-alumina films were qualitatively explained in terms of the BET theory and condensation theory.

引用

页码：1325 / 1330

页数：6

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