DETERMINATION OF LOCAL THICKNESS AND COMPOSITION IN THE ANALYTICAL ELECTRON-MICROSCOPE

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作者
HORITA, Z
ICHITANI, K
SANO, T
NEMOTO, M
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O4 [物理学];
学科分类号
0702 ;
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Local thicknesses are determined using the Differential X-ray absorption (DXA) method (Morris et al. 1979) and compared with those measured by the convergent beam electron diffraction (CBED) method (Kelly et al. 1975) and the contamination spot separation (CSS) method (Lorimer et al. 1976, Knox 1976). The reliability and applicability of the DXA method are evaluated.
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页码:155 / 156
页数:2
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