ELECTRON-SCATTERING AND LINE-PROFILES IN NEGATIVE ELECTRON RESISTS

被引：26

作者：

HEIDENREICH, RD ^{[1
]}

BALLANTYNE, JP ^{[1
]}

THOMPSON, LF ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1975年 / 12卷 / 06期

关键词：

D O I：

10.1116/1.568518

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1284 / 1288

页数：5

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