MANIPULATION OF 1-MUM BUBBLES WITH COARSE (GREATER-THAN 4 MUM) OVERLAY PATTERNS

被引：33
作者：
LIN, YS
ALMASI, GS
KEEFE, GE
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1977年 / 48卷 / 12期
关键词：
D O I：
10.1063/1.323602
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：5201 / 5208
页数：8
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