A COMPLEX DESIGN AND MICROFABRICATION SYSTEM FOR EXPERIMENTAL PRODUCTION OF PLANAR WAVE-GUIDE LENSES FOR INTEGRATED OPTICAL CIRCUITS

被引：2
作者：
KOCSANYI, L
KOSZA, R
BARABAS, M
SZARVAS, G
JAKAB, L
机构：
[1] Department of Atomic Physics, the Technical University of Budafest, H-1111 BUDAPEST
来源：
MICROELECTRONIC ENGINEERING | 1994年 / 25卷 / 2-4期
关键词：
Computer aided design - Doping (additives) - Electromagnetic wave diffraction - Electron beam lithography - Electron microscopes - Focusing - Lenses - Lithium compounds - Optical design - Optical waveguides - Optimization - Waveguide components;
D O I：
10.1016/0167-9317(94)90036-1
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Planar waveguide lenses are key elements of optical integrated circuits (OIC) widely applied in signal processing, and in optical communication systems. The computative design program allows to optimize lens-shape for best focusing performances. Design can be carried out also for anisotropic waveguide materials e.g. LiNbO3. Optimized lens-shape is encoded directly for electron-beam writing system based on a scanning electron microscope (JEOL 840 A) equipped with external lithographic beam control (ELPHY, Raith GmbH). By means of the system proton-exchanged lenses embedded in titanium-doped LiNbO3 waveguides were developed. These lenses could have near diffraction limited focus spots in relatively wide field angles (> +/- 1-degree).
引用
收藏
页码：351 / 355
页数：5
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