METALLIZATION IN MICROELECTRONICS

被引：61

作者：

GHATE, PB ^{[1
]}

BLAIR, JC ^{[1
]}

FULLER, CR ^{[1
]}

机构：

[1] TEXAS INSTRUMENTS INC, SEMICOND RES & ENGN LABS, DALLAS, TX 75222 USA

来源：

THIN SOLID FILMS | 1977年 / 45卷 / 01期

关键词：

D O I：

10.1016/0040-6090(77)90205-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：69 / 84

页数：16

共 42 条

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