NANOMETER-SCALE IMAGING OF POTENTIAL PROFILES IN OPTICALLY-EXCITED N-I-P-I HETEROSTRUCTURE USING KELVIN PROBE FORCE MICROSCOPY

被引:52
作者
CHAVEZPIRSON, A
VATEL, O
TANIMOTO, M
ANDO, H
IWAMURA, H
KANBE, H
机构
[1] NTT Basic Research Laboratories, Atsugi-shi, Kanagawa 243-01
关键词
D O I
10.1063/1.114867
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on measurements of the potential profile of a GaAs/AlCaAs n-i-p-i multiple quantum well structure using a scanning Kelvin probe force microscope (KFM). Using this novel technique we directly measure with meV precision and sub-100 nm spatial resolution the potential difference between n-i-p-i layers with and without external optical excitation, The measured potential profiles, which have not been directly imaged previously, agree well with potential profiles calculated for optically excited n-i-p-i structures, but modified by band bending effects at the surface. (C) 1995 American Institute of Physics.
引用
收藏
页码:3069 / 3071
页数:3
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