ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION OF INP/INGAASP ON NONPLANAR INP SUBSTRATES - APPLICATION TO MULTIPLE QUANTUM-WELL LASERS

We report the growth of InGaAs and InGaAsP quantum well heterostructures on InP substrates with [011̄] oriented grooves. We have shown that growth of these materials on non-planar substrates can result in lattice-mismatched layers on orientations other than (100) which in some cases gives rise to dislocations. In addition, the lateral patterning of quantum wells and quantum wire-like structures has been demonstrated in this material system. Finally, a quantum well laser, wherein lateral patterning of the well thickness was achieved by growing in a flat-bottomed groove, was fabricated. Without any additional growth steps these lasers exhibit a single stable spatial mode due to the waveguide formed at the groove.