CORRECT MEASUREMENTS OF ELECTRON-ENERGY DISTRIBUTION FUNCTION IN HIGH-FREQUENCY PLASMA

被引：0
|
作者：
GODYAK, VA
OKS, SN
机构：
来源：
ZHURNAL TEKHNICHESKOI FIZIKI | 1979年 / 49卷 / 07期
关键词：
D O I：
暂无
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1408 / 1411
页数：4
相关论文
共 50 条
  • [41] MEASUREMENT OF ELECTRON-ENERGY DISTRIBUTION FUNCTION IN A LOW-PRESSURE DISCHARGE PLASMA
    YAGURA, S
    OKUNO, Y
    OHTSU, Y
    FUJITA, H
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 (5A): : 1503 - 1504
  • [42] MEASUREMENT OF THE ELECTRON-ENERGY DISTRIBUTION FUNCTION IN FLAME PLASMA AT ATMOSPHERIC-PRESSURE
    SICHA, M
    CZECHOSLOVAK JOURNAL OF PHYSICS, 1979, 29 (06) : 640 - 645
  • [43] ELECTRON-ENERGY DISTRIBUTION FUNCTION IN THE COLLISIONAL-RADIATIVE MODEL OF ARGON PLASMA
    VLCEK, J
    ACTA PHYSICA SLOVACA, 1985, 35 (02) : 81 - 87
  • [44] ELECTRON-ENERGY DISTRIBUTION FUNCTION IN AN AFTERGLOW PLASMA .3. RADIAL DEPENDENCE
    BLAGOEV, AB
    KOLOKOLOV, NB
    LYAGUSHCHENO, RI
    PRAMATAROV, PM
    ZHURNAL TEKHNICHESKOI FIZIKI, 1977, 47 (10): : 2102 - 2107
  • [45] High-frequency measurements of plasma parameters in electron cyclotron resonance plasma etchers
    Watanabe, S
    Tamura, H
    Sumiya, M
    Omoto, Y
    Yoshioka, K
    Mizutani, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2002, 41 (01): : 346 - 351
  • [46] Advances in Langmuir probe diagnostics of the plasma potential and electron-energy distribution function in magnetized plasma
    Popov, Tsv K.
    Dimitrova, M.
    Ivanova, P.
    Kovacic, J.
    Gyergyek, T.
    Dejarnac, R.
    Stockel, J.
    Pedrosa, M. A.
    Lopez-Bruna, D.
    Hidalgo, C.
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2016, 25 (03):
  • [47] TIME-RESOLVED ELECTRON-ENERGY DISTRIBUTION FUNCTION MEASUREMENTS IN A LOW-FREQUENCY RF GLOW-DISCHARGE
    HOPKINS, MB
    ANDERSON, CA
    GRAHAM, WG
    EUROPHYSICS LETTERS, 1989, 8 (02): : 141 - 145
  • [48] ANALYTICAL STUDY OF THE INFLUENCE OF ELECTRON ELECTRON COLLISIONS ON THE HIGH-ENERGY PART OF THE ELECTRON-ENERGY DISTRIBUTION FUNCTION
    KORTSHAGEN, U
    SCHLUTER, H
    MAXIMOV, AV
    PHYSICA SCRIPTA, 1992, 46 (05): : 450 - 456
  • [49] EFFECT OF IONIC CURRENT ON MEASUREMENTS OF ELECTRON-ENERGY DISTRIBUTION FUNCTION BY SECOND DERIVATIVE METHOD
    DOVZHENKO, VA
    ERSHOV, AP
    SOLNTSEV, GS
    ZHURNAL TEKHNICHESKOI FIZIKI, 1974, 44 (04): : 851 - 854
  • [50] ELIMINATING THE INFLUENCE OF THE ION CURRENT ON PROBE MEASUREMENTS OF THE ELECTRON-ENERGY DISTRIBUTION FUNCTION IN PLASMAS
    KOLOKOLOV, NB
    KUDRYAVTSEV, AA
    KHROMOV, NA
    HIGH TEMPERATURE, 1991, 29 (03) : 336 - 339
12345