HIGH-ENERGY ION-IMPLANTATION IN POLYMER-FILMS

被引：0
|
作者：
ALIMOVA, LY [1 ]
DJAMALETDINOVA, IE [1 ]
PUGACHEVA, TS [1 ]
ILICHEVA, IE [1 ]
机构：
[1] TASHKENT TECH UNIV,TASHKENT 700000,UZBEKISTAN,USSR
来源：
VACUUM | 1992年 / 43卷 / 5-7期
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Results of experimental and theoretical studies on gas selective properties of polyvinyltrimethylsilane (PVTMS) under bombardment with 50-150 keV C+ and Ar+ ions with doses of 5 x 10(14)-10(16) cm-2 are presented. It was found that permeability and selectivity for various gases change essentially under high-energy irradiation. This effect depends on ion type and energy, implantation dose, and is conditioned by peculiarities of the interaction of the ion-polymer system and processes of defect formation and excitation of the electronic subsystem.
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页码：699 / 701
页数：3
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