CHEMI-LUMINESCENCE DURING THERMAL CHEMICAL VAPOR-DEPOSITION OF SIO2 FROM SILANE OXYGEN MIXTURES

被引：10
作者：
VANDEWEIJER, P
ZWERVER, BH
SUIJKER, JLG
机构：
来源：
CHEMICAL PHYSICS LETTERS | 1988年 / 153卷 / 01期
关键词：
D O I：
10.1016/0009-2614(88)80128-3
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：33 / 38
页数：6
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