共 50 条
[23]
Magnetized surface-wave discharges for submicrometer pattern transfer
[J].
PLASMA PROCESSING OF SEMICONDUCTORS,
1997, 336
:491-513
[26]
Pulsed surface wave sustained discharges: Modelling
[J].
ADVANCED TECHNOLOGIES BASED ON WAVE AND BEAM GENERATED PLASMAS,
1999, 67
:509-510
[29]
GLOBAL MODELLING OF CYLINDRICAL SURFACE-WAVE DISCHARGES: ARGON OR OXYGEN
[J].
2016 43RD IEEE INTERNATIONAL CONFERENCE ON PLASMA SCIENCE (ICOPS),
2016,