STRUCTURE AND OPTICAL-PROPERTIES OF MOO3 THIN-FILMS PREPARED BY CHEMICAL VAPOR-DEPOSITION

被引：61

作者：

ABDELLAOUI, A ^{[1
]}

MARTIN, L ^{[1
]}

DONNADIEU, A ^{[1
]}

机构：

[1] UNIV MONTPELLIER 2,CNRS,ETUD SEMICOND GRP 357,F-34060 MONTPELLIER,FRANCE

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1988年 / 109卷 / 02期

关键词：

Electrochromism - Films--Structure - Heat Treatment--Annealing;

D O I：

10.1002/pssa.2211090211

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The structure and optical properties of polycrystalline MoO3 thin films prepared by annealing of black molybdenum layers produced by chemical vapor deposition on fused quartz substrates were determined. X-ray diffraction spectra reveal that all the films consist of MoO3 crystallized in orthorhombic form. The optical indices (n and k), optical gap, thickness, and density of the films are determined. All these parameters vary as a function of the annealing conditions and film thickness. The values determined for the optical constants and the film densities are in agreement with the results found in the literature. Electrochromism is observed in these compounds.

引用

页码：455 / 462

页数：8

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