COLD-PLASMA PRODUCTION WITH HIGH-CONCENTRATION OF METASTABLE SPECIES BY RF DISCHARGE IN OXYGEN

被引:4
|
作者
DUMAS, JL [1 ]
机构
[1] CTR ETUD CRYOGEN AIR LIQUIDE,F-38360 SASSENAGE,FRANCE
来源
REVUE DE PHYSIQUE APPLIQUEE | 1977年 / 12卷 / 07期
关键词
D O I
10.1051/rphysap:019770012070103500
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1035 / 1038
页数:4
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